Peter H. Bartlau
3Patents
2h-index
9Co-inventors
37Inventor score
Filing activity: Nov 20, 2001 → Mar 21, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6541351B1 | Method for limiting divot formation in post shallow trench isolation processes | Electricity | 30 | Expired |
| US8568959B2 | Techniques for reducing degradation and/or modifying feature size of photomasks | Physics | 2 | Active |
| US11143953B2 | Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3 | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.