Peter Kloesch
2Patents
1h-index
6Co-inventors
27Inventor score
Filing activity: Mar 11, 2011 → Aug 2, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8212992B2 | Device for damping vibrations in projection exposure apparatuses for semiconductor lithography | Physics | 1 | Active |
| US9030644B2 | Projection exposure apparatus for semiconductor lithography including an actuator system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.