Inventor · Tung Chung, CN

Peter Spit

4Patents
1h-index
7Co-inventors
30Inventor score

Filing activity: Jun 30, 2004 → Dec 29, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US7158208B2 Lithographic apparatus and device manufacturing method Physics 19 Expired
US7116398B2 Lithographic apparatus and device manufacturing method Physics 1 Expired
US7375795B2 Lithographic apparatus, device manufacturing method, and device manufactured thereby Physics 0 Expired
US7684009B2 Lithographic apparatus and device manufacturing method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.