Ralph P. ANTONIO
4Patents
0h-index
14Co-inventors
31Inventor score
Filing activity: Oct 25, 2017 → Nov 18, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10365216B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US12288704B2 | Methods and apparatus for processing a substrate | Electricity | 0 | Active |
| US10883932B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US11215934B2 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.