Inventor

Rex Runyon

9Patents
4h-index
26Co-inventors
53Inventor score

Filing activity: Jun 4, 2002 → Jun 16, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6686995B2 Two-dimensional UV compatible programmable spatial filter Physics 14 Expired
US8194301B2 Multi-spot scanning system and method Emerging Cross-Sectional Technologies 12 Active
US8294125B2 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Electricity 6 Active
US6686994B2 UV compatible programmable spatial filter Physics 5 Expired
US9176069B2 System and method for apodization in a semiconductor device inspection system Physics 4 Active
US9395340B2 Interleaved acousto-optical device scanning for suppression of optical crosstalk Physics 4 Active
US9645093B2 System and method for apodization in a semiconductor device inspection system Physics 2 Active
US8461526B2 Electron beam column and methods of using same Electricity 1 Active
US10060884B2 Interleaved acousto-optical device scanning for suppression of optical crosstalk Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.