Inventor · Mountain View, CA, US

Rich Klein

14Patents

11h-index

16Co-inventors

65Inventor score

Filing activity: Oct 9, 1990 → Apr 25, 2001

Most-cited inventions

Patent	Title	Area	Cited by	Status
US5614765A	Self aligned via dual damascene	Electricity	125	Expired
US5705430A	Dual damascene with a sacrificial via fill	Electricity	113	Expired
US5795823A	Self aligned via dual damascene	Electricity	79	Expired
US5686354A	Dual damascene with a protective mask for via etching	Electricity	63	Expired
US5691238A	Subtractive dual damascene	Electricity	57	Expired
US5691573A	Composite insulation with a dielectric constant of less than 3 in a narrow space separating conductive lines	Electricity	39	Expired
US5776834A	Bias plasma deposition for selective low dielectric insulation	Electricity	27	Expired
USD333731S	Tie rack	General	17	Expired
US5955786A	Semiconductor device using uniform nonconformal deposition for forming low dielectric constant insulation between certain conductive lines	Electricity	17	Expired
US6051882A	Subtractive dual damascene semiconductor device	Electricity	13	Expired
US6048802A	Selective nonconformal deposition for forming low dielectric insulation between certain conductive lines	Electricity	11	Expired
US5990557A	Bias plasma deposition for selective low dielectric insulation	Electricity	10	Expired
US6287953A	Minimizing transistor size in integrated circuits	Electricity	9	Expired
US7026691B1	Minimizing transistor size in integrated circuits	Electricity	5	Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.