Inventor · Delft, NL

Richard Versluis

6Patents
2h-index
25Co-inventors
47Inventor score

Filing activity: Nov 21, 2006 → Sep 26, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US8382301B2 Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Physics 5 Active
US8585224B2 Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Physics 2 Active
US11194659B2 Method for executing a quantum error correction cycle in a quantum computer Physics 1 Active
US7624617B2 Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system Physics 0 Active
US7963144B2 Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system Physics 0 Active
US9176398B2 Method and system for thermally conditioning an optical element Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.