Method and system for thermally conditioning an optical element
US9176398B2 · kind B2 · utility
0Cited by
9References
13Claims
0Family size
Assignee
Inventors
- Roger W. Schmitz
- Tjarko Adriaan Rudolf Van Empel
- Marcel Johannus Elisabeth Hubertus Muitjens
- Lun Kai Cheng
- Franciscus Johannes Joseph Janssen
- Willem Arie Van Helden
- Richard Versluis
- Paulus Bartholomeus Johannes Schaareman
- Axel Sebastiaan Lexmond
- Evert Nieuwkoop
- Charles William Barras Potts
- Martinus Henricus Johannes Lemmen
- Frederik Van Der Graaf
- Mathilde Gertrudis Maria De Kroon
- Johannes Fransiscus Maria Velthuis
Key dates
| Filing date | May 20, 2009 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Jul 5, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.