Robert Chen
4Patents
3h-index
15Co-inventors
40Inventor score
Filing activity: Aug 11, 2005 → Sep 19, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7651587B2 | Two-piece dome with separate RF coils for inductively coupled plasma reactors | Electricity | 6 | Expired |
| US7572647B2 | Internal balanced coil for inductively coupled high density plasma processing chamber | Electricity | 5 | Active |
| US7789993B2 | Internal balanced coil for inductively coupled high density plasma processing chamber | Electricity | 5 | Active |
| US7629271B1 | High stress diamond like carbon film | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.