Inventor · Mountain View, CA, US

Robert Haney

3Patents
3h-index
7Co-inventors
47Inventor score

Filing activity: Mar 10, 1975 → Jul 27, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6395363B1 Sloped substrate support Emerging Cross-Sectional Technologies 39 Expired
US4064945A Electronic depth control system Human Necessities 34 Expired
US7813895B2 Methods for plasma matching between different chambers and plasma stability monitoring and control Physics 6 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.