Sloped substrate support
US6395363B1 · kind B1 · utility
39Cited by
18References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 1996 |
| Grant date | May 28, 2002 |
| Priority date | — |
| Expiry date | Nov 5, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate support comprising a shelf having a surface sloped at an angle such that the support contacts the substrate substantially at an edge portion of the substrate. The angle of the shelf is greater than an angle of the edge portion of the substrate. The surface of the shelf may be machined or polished to improve its smoothness. The substrate support thereby reduces the effect and severity of scratches on the substrate caused by the support. As a result, the substrate support improves substrate yield.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.