Inventor · San Mateo, CA, US

Robert Martinson

8Patents
5h-index
25Co-inventors
59Inventor score

Filing activity: Mar 2, 2000 → Jun 27, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6497734B1 Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput Emerging Cross-Sectional Technologies 411 Expired
US10286452B2 Three-dimensional printing and three-dimensional printers Emerging Cross-Sectional Technologies 120 Active
US6760976B1 Method for active wafer centering using a single sensor Emerging Cross-Sectional Technologies 33 Expired
US6500321B1 Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target Electricity 29 Expired
US6264804A System and method for handling and masking a substrate in a sputter deposition system Chemistry; Metallurgy 14 Expired
US6413381B1 Horizontal sputtering system Chemistry; Metallurgy 3 Expired
US6406598B2 System and method for transporting and sputter coating a substrate in a sputter deposition system Chemistry; Metallurgy 2 Expired
US9255323B2 Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.