Robert Martinson
8Patents
5h-index
25Co-inventors
59Inventor score
Filing activity: Mar 2, 2000 → Jun 27, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6497734B1 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Emerging Cross-Sectional Technologies | 411 | Expired |
| US10286452B2 | Three-dimensional printing and three-dimensional printers | Emerging Cross-Sectional Technologies | 120 | Active |
| US6760976B1 | Method for active wafer centering using a single sensor | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6500321B1 | Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target | Electricity | 29 | Expired |
| US6264804A | System and method for handling and masking a substrate in a sputter deposition system | Chemistry; Metallurgy | 14 | Expired |
| US6413381B1 | Horizontal sputtering system | Chemistry; Metallurgy | 3 | Expired |
| US6406598B2 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Chemistry; Metallurgy | 2 | Expired |
| US9255323B2 | Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.