Robert Otwell
4Patents
4h-index
3Co-inventors
36Inventor score
Filing activity: Sep 5, 1997 → Mar 27, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6053687A | Cost effective modular-linear wafer processing | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6196532A | 3 point vacuum chuck with non-resilient support members | Electricity | 41 | Expired |
| US6270306A | Wafer aligner in center of front end frame of vacuum system | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6238161A | Cost effective modular-linear wafer processing | Emerging Cross-Sectional Technologies | 27 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.