Roberto Cesar Cotlear
5Patents
1h-index
7Co-inventors
36Inventor score
Filing activity: Apr 7, 2014 → Sep 5, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10283397B2 | Substrate lift pin actuator | Electricity | 4 | Active |
| US10490435B2 | Cooling element for an electrostatic chuck assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US9155184B2 | Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods | Electricity | 1 | Active |
| US11264252B2 | Chamber lid with integrated heater | Electricity | 0 | Active |
| US11387135B2 | Conductive wafer lift pin o-ring gripper with resistor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.