Patent · US Active

Chamber lid with integrated heater

US11264252B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Michael D. Willwerth · Campbell, US
Jeffrey Ludwig · San Jose, US
Benjamin Schwarz · Strohberg, DE
Roberto Cesar Cotlear · Sunnyvale, US

Key dates

Filing date	Sep 5, 2019
Grant date	Mar 1, 2022
Priority date	—
Expiry date	Jan 31, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6719
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Implementations described herein provide a chamber lid assembly. In one embodiment, a chamber lid assembly includes a heater embedded in a dielectric body forming a boundary of a processing chamber, wherein the heater has one or more heating zones that are independently controlled.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.