Rumen Iliew
4Patents
1h-index
13Co-inventors
34Inventor score
Filing activity: Aug 8, 2014 → Sep 4, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10001631B2 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Emerging Cross-Sectional Technologies | 2 | Active |
| US9470872B2 | Reflective optical element | Physics | 1 | Active |
| US9348234B2 | Microlithographic apparatus | Physics | 1 | Active |
| US9709770B2 | Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.