Inventor · Hikari, JP

Ryoji Hamasaki

5Patents
3h-index
15Co-inventors
46Inventor score

Filing activity: Mar 8, 1996 → Sep 30, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US5895586A Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum Emerging Cross-Sectional Technologies 41 Expired
US5874012A Plasma processing apparatus and plasma processing method Electricity 33 Expired
US6156663A Method and apparatus for plasma processing Electricity 6 Expired
US7565879B2 Plasma processing apparatus Electricity 3 Expired
US7208422B2 Plasma processing method Electricity 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.