Inventor · Sunnyvale, CA, US

Samuel Wilson

4Patents
4h-index
19Co-inventors
40Inventor score

Filing activity: Nov 29, 1996 → Mar 17, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6110530A CVD method of depositing copper films by using improved organocopper precursor blend Chemistry; Metallurgy 245 Expired
US5740009A Apparatus for improving wafer and chuck edge protection Electricity 73 Expired
US6464790B1 Substrate support member Electricity 67 Expired
US6319728A Method for treating a deposited film for resistivity reduction Electricity 26 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.