Sangjun Cho
4Patents
2h-index
9Co-inventors
37Inventor score
Filing activity: May 24, 2007 → Nov 7, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7782591B2 | Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking | Electricity | 6 | Active |
| US8283255B2 | In-situ photoresist strip during plasma etching of active hard mask | Electricity | 3 | Active |
| US10546756B2 | Method for generating vertical profiles in organic layer etches | Electricity | 1 | Active |
| US8912633B2 | In-situ photoresist strip during plasma etching of active hard mask | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.