Inventor · Tokyo, JP

Satoru Ide

10Patents
3h-index
19Co-inventors
57Inventor score

Filing activity: Dec 6, 1999 → Jul 8, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6342166B1 Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing Electricity 12 Expired
US6520895B2 Polishing device and polishing pad component exchange device and method Emerging Cross-Sectional Technologies 11 Expired
US6183656A Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing Physics 6 Expired
US8366514B2 Semiconductor substrate planarization apparatus and planarization method Performing Operations; Transporting 2 Active
US11549237B2 Work vehicle and control system for work vehicle Electricity 1 Active
US10556500B2 Work vehicle Performing Operations; Transporting 1 Active
US12358095B2 Substrate grinding device and substrate grinding method Performing Operations; Transporting 0 Active
US12241235B2 Work machine Fixed Constructions 0 Active
US10215071B2 Exhaust gas aftertreatment unit and work vehicle Emerging Cross-Sectional Technologies 0 Active
US11745299B2 Grinding method of composite substrate including resin and grinding apparatus thereof Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.