Scott Beherrell
3Patents
3h-index
4Co-inventors
36Inventor score
Filing activity: Jun 30, 1997 → Apr 23, 1999
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5759281A | CVD reactor for uniform heating with radiant heating filaments | Chemistry; Metallurgy | 375 | Expired |
| US5840124A | Wafer carrier with flexible wafer flat holder | Chemistry; Metallurgy | 34 | Expired |
| US6368404B1 | Induction heated chemical vapor deposition reactor | Chemistry; Metallurgy | 13 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.