Inventor · Piscataway, NJ, US

Sen Liu

37Patents
6h-index
23Co-inventors
65Inventor score

Filing activity: Jan 15, 2003 → Oct 30, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US7425643B1 Electron acceptors for nonlinear optical chromophores Chemistry; Metallurgy 18 Active
US7014796B2 Nonlinear optical compounds and methods for their preparation Physics 14 Expired
US7346259B1 Thermally reversibly crosslinkable polymer as cladding material for electro-optic devices Physics 12 Expired
US7838200B2 Photoresist compositions and method for multiple exposures with multiple layer resist systems Physics 10 Active
US7078542B2 Nonlinear optical compounds and methods for their preparation Physics 7 Expired
US7655379B2 Ionic, organic photoacid generators for DUV, MUV and optical lithography based on peraceptor-substituted aromatic anions Physics 6 Active
US8343706B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 6 Active
US8871596B2 Method of multiple patterning to form semiconductor devices Electricity 4 Active
US8709700B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 4 Active
US8236476B2 Multiple exposure photolithography methods and photoresist compositions Emerging Cross-Sectional Technologies 4 Active
US8293451B2 Near-infrared absorbing film compositions Physics 4 Active
US8628909B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8617791B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8518630B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8623584B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8663901B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8715907B2 Developable bottom antireflective coating compositions for negative resists Physics 3 Active
US8999624B2 Developable bottom antireflective coating composition and pattern forming method using thereof Chemistry; Metallurgy 3 Active
US8658345B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US8628910B2 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Emerging Cross-Sectional Technologies 3 Active
US9040225B2 Developable bottom antireflective coating composition and pattern forming method using thereof Chemistry; Metallurgy 2 Active
US8772376B2 Near-infrared absorbing film compositions Emerging Cross-Sectional Technologies 2 Active
US8568960B2 Multiple exposure photolithography methods Emerging Cross-Sectional Technologies 2 Active
US7910538B2 Detergent composition Chemistry; Metallurgy 2 Active
US8986918B2 Hybrid photoresist composition and pattern forming method using thereof Emerging Cross-Sectional Technologies 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.