Serge Kosche
3Patents
1h-index
9Co-inventors
37Inventor score
Filing activity: Sep 26, 2014 → Apr 19, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9679749B2 | Gas distribution device with actively cooled grid | Electricity | 1 | Active |
| US11967486B2 | Substrate processing system including dual ion filter for downstream plasma | Electricity | 0 | Active |
| US12347650B2 | Substrate processing system including dual ion filter for downstream plasma | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.