Shawyon Jafari
6Patents
1h-index
40Co-inventors
40Inventor score
Filing activity: Oct 25, 2017 → Apr 20, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10600624B2 | System and method for substrate processing chambers | Electricity | 3 | Active |
| US11853042B2 | Part, sensor, and metrology data integration | Physics | 1 | Active |
| US10365216B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US11851758B2 | Fabrication of a high temperature showerhead | Emerging Cross-Sectional Technologies | 0 | Active |
| US10883932B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US11848218B2 | Semiconductor chamber component cleaning systems | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.