Shay Yogev
8Patents
1h-index
18Co-inventors
40Inventor score
Filing activity: Nov 16, 2017 → Nov 13, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11763181B2 | Metrology and process control for semiconductor manufacturing | Physics | 1 | Active |
| US11093840B2 | Metrology and process control for semiconductor manufacturing | Physics | 1 | Active |
| US11107738B2 | Layer detection for high aspect ratio etch control | Electricity | 1 | Active |
| US12236364B2 | Metrology and process control for semiconductor manufacturing | Physics | 0 | Active |
| US11300948B2 | Process control of semiconductor fabrication based on spectra quality metrics | Emerging Cross-Sectional Technologies | 0 | Active |
| US11815819B2 | Machine and deep learning methods for spectra-based metrology and process control | Physics | 0 | Active |
| US11929291B2 | Layer detection for high aspect ratio etch control | Electricity | 0 | Active |
| US12321102B2 | Machine and deep learning methods for spectra-based metrology and process control | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.