Shiro Koyama
5Patents
5h-index
18Co-inventors
49Inventor score
Filing activity: Jul 19, 1991 → Jun 1, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5625526A | Electrostatic chuck | Electricity | 105 | Expired |
| US5665167A | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Electricity | 89 | Expired |
| US5320704A | Plasma etching apparatus | Electricity | 18 | Expired |
| US5474643A | Plasma processing apparatus | Electricity | 6 | Expired |
| US5236556A | Plasma apparatus | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.