Plasma apparatus
US5236556A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jul 19, 1991 |
| Grant date | Aug 17, 1993 |
| Priority date | — |
| Expiry date | Jul 19, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3455
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generating section generates a plasma in a process vessel. A plasma process section executes a plasma process to a substance to be processed by moving the plasma generated by the plasma generating section. A sensor section outputs an electrical signal corresponding to the intensity of plasma light having a predetermined wavelength in the plasma when the plasma process is executed by the plasma process section. A smoothing section smooths the electrical signal output from the sensor section. A end-point detecting section detects an end-point of the plasma process in accordance with the signal smoothed by the smoothing section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.