Shotaro Kitayama
4Patents
2h-index
8Co-inventors
27Inventor score
Filing activity: Nov 2, 2017 → Feb 28, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10395950B2 | Substrate processing apparatus, substrate processing method, and recording medium | Electricity | 3 | Active |
| US10504718B2 | Substrate processing apparatus, substrate processing method, and storage medium | Electricity | 2 | Active |
| US10692739B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US10950465B2 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Chemistry; Metallurgy | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.