Simon McClatchie
6Patents
3h-index
16Co-inventors
46Inventor score
Filing activity: Feb 17, 1999 → Sep 28, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6242366A | Methods and apparatus for treating a semiconductor substrate | Emerging Cross-Sectional Technologies | 37 | Expired |
| US7129167B1 | Methods and systems for a stress-free cleaning a surface of a substrate | Electricity | 5 | Expired |
| US6988934B1 | Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system | Performing Operations; Transporting | 4 | Expired |
| US7040954B1 | Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing | Performing Operations; Transporting | 3 | Expired |
| US8403727B1 | Pre-planarization system and method | Electricity | 2 | Active |
| US7040970B2 | Apparatus and method for distributing a polishing fluid | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.