Inventor · Bethel, CT, US

Sofia Pombrik

5Patents
4h-index
6Co-inventors
46Inventor score

Filing activity: Mar 31, 1995 → Dec 4, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6110529A Method of forming metal films on a substrate by chemical vapor deposition Electricity 188 Expired
US5820664A Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same Emerging Cross-Sectional Technologies 159 Expired
US5783716A Platinum source compositions for chemical vapor deposition of platinum Electricity 44 Expired
US6162712A Platinum source compositions for chemical vapor deposition of platinum Electricity 41 Expired
US8299286B2 Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition Chemistry; Metallurgy 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.