Inventor · Pasadena, CA, US

Stephen E. Vargo

4Patents
3h-index
6Co-inventors
39Inventor score

Filing activity: Nov 1, 2000 → Oct 30, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US7838322B1 Method of enhancing an etch system Performing Operations; Transporting 46 Active
US6533554B1 Thermal transpiration pump Mechanical Engineering; Lighting; Heating 27 Expired
US6546182B2 Angled fiber termination and methods of making the same Physics 8 Expired
US8431491B2 Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufacture Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.