Stephen E. Vargo
4Patents
3h-index
6Co-inventors
39Inventor score
Filing activity: Nov 1, 2000 → Oct 30, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7838322B1 | Method of enhancing an etch system | Performing Operations; Transporting | 46 | Active |
| US6533554B1 | Thermal transpiration pump | Mechanical Engineering; Lighting; Heating | 27 | Expired |
| US6546182B2 | Angled fiber termination and methods of making the same | Physics | 8 | Expired |
| US8431491B2 | Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufacture | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.