Inventor · Cambridge, MA, US

Sterling Watson

14Patents
7h-index
23Co-inventors
66Inventor score

Filing activity: Sep 19, 1997 → Nov 16, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6076465A System and method for determining reticle defect printability Physics 76 Expired
US7271891B1 Apparatus and methods for providing selective defect sensitivity Electricity 30 Expired
US7440093B1 Apparatus and methods for providing selective defect sensitivity Electricity 27 Active
US7297453B2 Systems and methods for mitigating variances on a patterned wafer using a prediction model Emerging Cross-Sectional Technologies 14 Expired
US7303842B2 Systems and methods for modifying a reticle's optical properties Emerging Cross-Sectional Technologies 14 Expired
US9002497B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 8 Active
US6381358B1 System and method for determining reticle defect printability Physics 7 Expired
US7300729B2 Method for monitoring a reticle Emerging Cross-Sectional Technologies 4 Expired
US6731787B1 System and method for determining reticle defect printability Physics 3 Expired
US7300725B2 Method for determining and correcting reticle variations Emerging Cross-Sectional Technologies 3 Expired
US11557031B2 Integrated multi-tool reticle inspection Physics 0 Active
US10713771B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 0 Active
US11002597B2 Solar spectrum sensor for determining value of solar spectrum based on determined average photon energy Emerging Cross-Sectional Technologies 0 Active
US11348222B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.