Steven J. Haney
12Patents
4h-index
17Co-inventors
57Inventor score
Filing activity: May 3, 1983 → Oct 1, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6031598A | Extreme ultraviolet lithography machine | Physics | 73 | Expired |
| US6333775A | Extreme-UV lithography vacuum chamber zone seal | Physics | 59 | Expired |
| US6192897A | Apparatus and method for in-situ cleaning of resist outgassing windows | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7195354B2 | Adaptive ophthalmologic system | Human Necessities | 8 | Expired |
| US6545745B2 | Extreme-UV lithography vacuum chamber zone seal | Physics | 4 | Expired |
| US4538068A | Manipulator having thermally conductive rotary joint for transferring heat from a test specimen | Physics | 4 | Expired |
| US6549264B2 | Extreme-UV lithography vacuum chamber zone seal | Physics | 2 | Expired |
| US6328282A | Motorized support jack | Performing Operations; Transporting | 2 | Expired |
| US6642995B2 | Mask-to-wafer alignment system | Physics | 2 | Expired |
| US6900952B2 | System and method for reproducibly mounting an optical element | Physics | 1 | Expired |
| US6561486B2 | Motorized support jack | Performing Operations; Transporting | 0 | Expired |
| US6734422B2 | Portable outgas detection apparatus | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.