Inventor · Tokorozawa, JP

Sunao Matsubara

6Patents
5h-index
21Co-inventors
59Inventor score

Filing activity: Jul 29, 1985 → Feb 8, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6180020A Polishing method and apparatus Performing Operations; Transporting 31 Expired
US5815396A Vacuum processing device and film forming device and method using same Electricity 29 Expired
US5707500A Vacuum processing equipment, film coating equipment and deposition method Electricity 25 Expired
US4721535A Solar cell Emerging Cross-Sectional Technologies 8 Expired
US6478977B1 Polishing method and apparatus Electricity 5 Expired
US4642412A Photo-electronic conversion apparatus with light pattern discriminator Emerging Cross-Sectional Technologies 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.