Susumu Yokoo
6Patents
1h-index
10Co-inventors
40Inventor score
Filing activity: Aug 7, 2015 → Sep 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10115636B2 | Processing method for workpiece | Electricity | 1 | Active |
| US11171009B2 | Processing method of wafer | Electricity | 0 | Active |
| US10790192B2 | Wafer processing method | Performing Operations; Transporting | 0 | Active |
| US12094776B2 | Wafer processing method | Electricity | 0 | Active |
| US10896836B2 | Electrostatic chuck | Electricity | 0 | Active |
| US10790193B2 | Wafer processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.