Tadayasu Nishikawa
4Patents
1h-index
4Co-inventors
37Inventor score
Filing activity: Feb 28, 2002 → May 8, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7073185B2 | Objective lens driving device and optical pickup device employing the objective lens driving device | Physics | 1 | Expired |
| US11520226B2 | Imprint method, imprint apparatus, imprint system, and method of manufacturing article | Electricity | 0 | Active |
| US7626680B2 | Exposure apparatus and device fabrication method using the same | Physics | 0 | Active |
| US7864337B2 | Positioning apparatus, exposure apparatus, and device manufacturing method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.