Tanbir HASAN
3Patents
1h-index
6Co-inventors
30Inventor score
Filing activity: Jun 22, 2017 → Jan 29, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11029614B2 | Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus | Physics | 2 | Active |
| US10908515B2 | Method and apparatus for pattern fidelity control | Physics | 1 | Active |
| US11669020B2 | Method and apparatus for pattern fidelity control | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.