Taro Sugihara
10Patents
3h-index
1Co-inventors
46Inventor score
Filing activity: Nov 18, 2005 → Nov 28, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8072578B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 534 | Active |
| US8059260B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8576379B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 4 | Active |
| US9298108B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 2 | Active |
| US9857692B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 2 | Active |
| US9348238B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 1 | Active |
| US10222708B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 1 | Active |
| US9223231B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 0 | Active |
| US9223230B2 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Emerging Cross-Sectional Technologies | 0 | Active |
| US8054465B2 | Position measurement method | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.