Inventor · Yokohama, JP

Tetsuzo Tanimoto

3Patents
3h-index
3Co-inventors
39Inventor score

Filing activity: Nov 20, 1989 → Sep 30, 1994

Most-cited inventions

PatentTitleAreaCited byStatus
US5016149A Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same Physics 67 Expired
US5227862A Projection exposure apparatus and projection exposure method Physics 30 Expired
US6094268A Projection exposure apparatus and projection exposure method Physics 10 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.