Tetsuzo Tanimoto
3Patents
3h-index
3Co-inventors
39Inventor score
Filing activity: Nov 20, 1989 → Sep 30, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5016149A | Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same | Physics | 67 | Expired |
| US5227862A | Projection exposure apparatus and projection exposure method | Physics | 30 | Expired |
| US6094268A | Projection exposure apparatus and projection exposure method | Physics | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.