Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same
US5016149A · kind A · utility
67Cited by
3References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 1989 |
| Grant date | May 14, 1991 |
| Priority date | — |
| Expiry date | Nov 20, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70583
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illuminating method and an illuminating apparatus for use in combination, for example, with an exposure apparatus. The illuminating apparatus comprises amplitude distribution control means for converting the intensity distribution of a light beam emitted by a highly directional light source into a substantially linear intensity distribution, beam splitting means for splitting the light beam into a plurality of component beams, and superposing means for superposing the component beams in a desired area on an object, such as a reticle, in an uniform illuminance distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.