Teunis Van Dam
2Patents
1h-index
6Co-inventors
33Inventor score
Filing activity: Jun 12, 2017 → Dec 28, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11860552B2 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Electricity | 1 | Active |
| US12287586B2 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.