Inventor · Garching bei München, DE

Thomas Huelsmann

2Patents
1h-index
5Co-inventors
37Inventor score

Filing activity: Sep 16, 1998 → Dec 4, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6373272B1 Arrangement for the testing of semiconductor structures Physics 1 Expired
US9824909B2 Chuck, in particular for use in a mask aligner Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.