Thomas Theiler
3Patents
2h-index
11Co-inventors
41Inventor score
Filing activity: Oct 24, 1997 → Aug 4, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5965047A | Rapid thermal processing (RTP) system with rotating substrate | Electricity | 29 | Expired |
| US7704898B2 | Method for the thermal treatment of disk-shaped substrates | Electricity | 9 | Expired |
| US8716153B2 | Device and method for producing dielectric layers in microwave plasma | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.