Timo Vähä-Ojala
2Patents
1h-index
6Co-inventors
27Inventor score
Filing activity: Sep 23, 2020 → Nov 25, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10982325B2 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Electricity | 2 | Active |
| US12325915B2 | Substrate processing apparatus and method | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.