Timo Wandel
2Patents
1h-index
4Co-inventors
33Inventor score
Filing activity: Sep 3, 2002 → Oct 25, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7820343B2 | Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate | Physics | 1 | Active |
| US6821693B2 | Method for adjusting a multilevel phase-shifting mask or reticle | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.