Tom Kirschenheiter
4Patents
1h-index
8Co-inventors
33Inventor score
Filing activity: Mar 18, 2014 → Jun 15, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10167557B2 | Gas distribution system, reactor including the system, and methods of using the same | Emerging Cross-Sectional Technologies | 429 | Active |
| US10604847B2 | Gas distribution system, reactor including the system, and methods of using the same | Emerging Cross-Sectional Technologies | 1 | Active |
| US11390950B2 | Reactor system and method to reduce residue buildup during a film deposition process | Chemistry; Metallurgy | 0 | Active |
| US12043899B2 | Reactor system and method to reduce residue buildup during a film deposition process | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.