Inventor · Somerville, MA, US

Tom Lada

2Patents
0h-index
9Co-inventors
24Inventor score

Filing activity: Dec 4, 2015 → Feb 25, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US11681227B2 Enhanced EUV photoresist materials, formulations and processes Physics 0 Active
US10290500B2 Spin on hard mask material Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.