Inventor · Kakegawa, JP

Tomoyasu YASHIMA

2Patents
0h-index
4Co-inventors
21Inventor score

Filing activity: Jun 19, 2017 → Nov 21, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US11156920B2 Lithography composition, a method for forming resist patterns and a method for making semiconductor devices Physics 0 Active
US10451974B2 Rinse composition, a method for forming resist patterns and a method for making semiconductor devices Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.