Inventor · Oyama, JP

Tooru Abe

17Patents
7h-index
22Co-inventors
66Inventor score

Filing activity: May 18, 1989 → Aug 10, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US5296819A Polymer capacitative moisture sensitive device comprising heating means Physics 56 Expired
US5705879A Discharge tube driving device and piezoelectric transformer therefor Electricity 35 Expired
US5751092A Piezoelectric transformer and power converting apparatus employing the same Electricity 28 Expired
US8324600B2 Apparatus and method for measuring and controlling target trajectory in chamber apparatus Electricity 22 Active
US5322612A Carbon dioxide gas detection element Physics 15 Expired
US4920451A Moisture-sensitive element Physics 14 Expired
US5161085A Moisture sensitive element and method of manufacturing the same Physics 10 Expired
US5635828A Active filter circuit and power supply apparatus including same Emerging Cross-Sectional Technologies 6 Expired
US8502178B2 Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon Electricity 6 Active
US6031341A Miniaturized transformer and inverter circuit and discharge tube glow circuit including such miniaturized transformer Electricity 6 Expired
US10102938B2 Extreme ultraviolet light generating apparatus Electricity 4 Active
US8525140B2 Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system Physics 3 Active
US8569722B2 Extreme ultraviolet light generation apparatus Electricity 3 Active
US8867583B2 Excimer laser apparatus and excimer laser system Electricity 2 Active
US9425576B2 Excimer laser apparatus and excimer laser system Electricity 1 Active
US9954340B2 Excimer laser apparatus and excimer laser system Electricity 0 Active
US10971887B2 Laser device and laser device control method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.