Toshiro Itani
4Patents
2h-index
1Co-inventors
34Inventor score
Filing activity: Mar 9, 1998 → Mar 1, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6033827A | Chemically amplified resist | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8163462B2 | Photosensitive composition, method for forming pattern, and method for manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 2 | Active |
| US6168900A | Chemically amplified resist | Emerging Cross-Sectional Technologies | 1 | Expired |
| US10095108B2 | Photosensitive composition and pattern formation method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.